Fabrication Techniques for MEMS-based Sensors: Clinical Perspective

Dr. Hardik J. Pandya is a core faculty member in the Department of Electronic Systems Engineering, Division of Electrical Sciences, IISc Bangalore where he is developing Advanced Microsystems and Biomedical Devices Facility for Clinical Research and Biomedical and Electronic (10-6-10-9) Engineering Systems Laboratory to carry out cutting-edge research on novel devices to solve unmet problems in biology and medicine. He is recipient of prestigious Early Career Research Award from Science and Engineering Research Board, Government of India as well as a start-up grant of 228 Lacs from IISc. He has taught Design for Analog Circuits, Analog Integrated Circuits, VLSI technology, and Semiconductor Devices to undergraduate and graduate students from Electronic Engineering, Instrumentation Engineering, and Applied Physics. He seek to understand and exploit novel ways of fabricating microengineering devices using glass, silicon, polymers and integrate with unusual classes of micro/nanomaterials.

COURSE LAYOUT:

Week 1  :  Introduction to microengineering devices and its applications
Week 2  :   Clean room, contaminants, wafer cleaning processes (DI water, RCA, metallic impurities, etc.).
Week 3  : Introduction to the microheater, force sensors, microfluidic devices, its specifications, and applications.
Week 4  :  Masks: Types of masks, Types of Photoresists, Spin Coaters Lithography process: optical lithography, x-ray, and e-beam lithography, lift-off techniques, soft lithography, Use of resists (spin coating, positive and negative photoresists), photoresist pre-baking, exposure, and development.
Week 5  :  Etching: Isotropic/anisotropic, selectivity, wet and plasma assisted etching.
Week 6  :  Types of wafers and orientations. Techniques of metallization: PVD [(Sputtering – DC, RF, and Magnetron), thermal evaporation, e-beam evaporation].
Week 7  :  Chemical Vapor Deposition: Dielectric films (Plasma Enhance Chemical Vapor Deposition (PECVD)), Atomic Layer Deposition
Week 8  :  Understanding and designing the process flow for fabricating microengineering devices. Process flow for microheater, force sensors, and microfluidic devices.
Week 9  :  Wafer dicing and bonding techniques. Microfluidic Chips
Week 10  :  Process Flow for Fabricating Flexible Force Sensors and Force Sensors on Silicon, Process Flow for Fabricating VOC sensors, Biochips
Week 11  :  Clinical Research: Problems and Solutions using Microengineering Device
Week 12  :  Visit to non-conventional Class 10000 Clean Room and discussing few equipment within

SUGGESTED READING MATERIALS:

1.J.D. Plummer, M.D. Deal, P.G. Griffin, Silicon VLSI Technology, Pearson Education, 2001. S.A. Campbell,
2.The Science and Engineering of Microelectronic Fabrication, Oxford University Press, 2001. S.M. Sze (Ed), VLSI Technology, 2nd Edition, McGraw Hill, 1988 Senturia
3.S. D., Microsystem Design, Kluwer Academic Publisher, 2001 Madou, M Fundamentals of Microfabrication, CRC Press, 1997. Gad-el-Hak, M., Ed.;
4.The MEMS Handbook; CRC Press: New York, NY, 2002.